82. Impact base excitation method with stacked PZT actuator for MEMS dynamic characterization

Dongsheng She1, Yiliu Yang2, Zefei Wei3, Zhen Yu4

1, 3, 4College of Engineering, Bohai University, Jinzhou 121000, China

2Research and Teaching Institute of College Basics, Bohai University, Jinzhou 121000, China

1Corresponding author

E-mail: 1mems-sds@163.com, 2yliu0326@163.com, 3weizefei@163.com, 4mr.yuzhen@foxmail.com

(Received 2 November 2015; received in revised form 25 January 2016; accepted 17 February 2016)

Abstract. An impact base excitation method with stacked PZT actuator for MEMS dynamic characterization was studied. A typical impact base excitation device mainly includes a stacked PZT actuator, a base structure and an impulse power source. The principle of this method is as follows. The tested microstructure was attached on the top surface of PZT through the base structure in between. Applying a transient impulse voltage on PZT, an impact will be generated in the vertical direction of PZT. The impact will strike the base structure to vibrate. The tested microstructure can be excited by the movement of the base structure. Basing on the principle of this method, a dynamic measurement system for piezoresistive microcantilevers was established. A laser deflection system was developed to measure the frequency bandwidth of excitation device. The experiments on the frequency bandwidth of excitation device and the dynamic characteristics of a T-shaped piezoresistive microcantilever were carried out. The results show that this method is effective for MEMS dynamic characteristics measurement.

Keywords: MEMS dynamic characterization, base excitation, impact, PZT, piezoresistive microcantilever.

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Cite this article

She Dongsheng, Yang Yiliu, Wei Zefei, Yu Zhen Impact base excitation method with stacked PZT actuator for MEMS dynamic characterization. Journal of Measurements in Engineering, Vol. 4, Issue 1, 2016, p. 7‑14.

 

Journal of Measurements in Engineering. March 2016, Volume 4, Issue 1

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